发明名称 Semiconductor component, e.g. power MOSFET
摘要 The component includes an n-type semiconductor layer (2) deposited in the main surface of a heavily doped n-type substrate (1). The layer forms a pn-junction with a p-type body section (16), with the body section ending at a side wall (51) of a concave section (50) of the semiconductor layer surface. In the body section is an n-type source region (4) and a channel region (5) on the concave section side wall. The channel region is at least covered by a gate insulating film (8), on which is deposited a gate electrode. The concave section is of a grid depression pattern over the semiconductor layer surface.
申请公布号 DE19640443(A1) 申请公布日期 1997.04.03
申请号 DE19961040443 申请日期 1996.09.30
申请人 NIPPONDENSO CO., LTD., KARIYA, AICHI, JP 发明人 OKABE, NAOTO, KARIYA, AICHI, JP;YAMAMOTO, TSUYOSHI, KARIYA, AICHI, JP
分类号 H01L21/336;H01L29/06;H01L29/739;H01L29/78;(IPC1-7):H01L29/78;H01L27/088 主分类号 H01L21/336
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