METHOD AND APPARATUS FOR SILICON DEPOSITION IN A FLUIDIZED-BED REACTOR

摘要

Silicon beads (102) are produced by chemical vapor deposition (CVD) on seed particles (102) generated internal to a CVD reactor (101). The reactor (101) has multiple zones, including an inlet zone (116) where beads (102) are maintained in a submerged spouted bed and an upper zone (118, 120) where beads are maintained in a bubbling fluidized bed. A tapered portion (118) of the upper zone (118, 120) segregates beads by size. Systems for inspecting, sorting and transporting product beads are also disclosed.