| 摘要 |
The capacitor has a pair of capacitor electrodes (E1,E2), one of which is embedded in the other. The embedded electrode (E1) is provided by at least 2 successive conductive layers (1,2,3...) made of different materials, at least one of which is aluminium (Al), or an electrically conductive Al alloy, or titanium, or a conductive titanium alloy. Pref. the adjacent layers of the embedded electrode are of different cross-sectional width. The other electrode (E2) is pref. used in common for a number of embedded electrodes for respective integrated capacitors. Each 2 adjacent memory cells within the memory pref. use an integrated capacitor and a capacitor of different type, e.g. a plate capacitor or a trench capacitor, respectively.
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