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发明名称
摘要
申请公布号	JP2597245(B2)	申请公布日期	1997.04.02
申请号	JP19910083335	申请日期	1991.03.22
申请人		发明人
分类号	C23C16/44;C23C16/455;H01L21/31;(IPC1-7):C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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