| 摘要 |
PURPOSE:To reduce the amplitude of vibration and to damp the vibration in short time, in a vibration isolator for X-Y table, by bringing a resilient member pressure inserted into a tubular shell container into normally pressed condition by means of a shell container and a device fixing member. CONSTITUTION:In a vibration isolator 10 for X-Y table, a tubular shell container 12 made of steel pipe is secured onto an iron plate substrate 11 having an air vent 11a, then a resilient member 13 of polychloroprene rubber or silicon rubber having hardness in the order of 20-30 is pressure inserted therein and a device fixing member 14 is further pressure inserted into a central circular hole 13a. Since the resilient member 13 is normally pressed by the shell container 12 and the device fixing member 14 under assembled condition, deformation is suppressed and the vibration can be damped in short time. |
