Repair of digital micromirror device having white defects

摘要

A method of repairing mirror elements of a digital micromirror device (DMD) that have become stuck in an "on" position. The mirror element (10) is located and targeted with a laser beam. The wavelength, pulse duration, and power of the radiation is selected so that the mirror component (11) of the defective mirror element (10) will be ablated without affecting the underlying circuitry or neighboring mirror elements (10).