Mirror arrangement with a deformable mirror element

摘要

A mirror arrangement with a deformable mirror element, and which includes a housing which is provided for the retention of the mirror element, and whereby a cooling installation is provided for the conducting off of excess heat or thermal energy from the mirror arrangement. The cooling installation possesses a cooling chamber or space provided in the housing which is streamed through by a flow of a cooling medium and which, through an inherently stable separator element constituted from a good heat-conductive material, is spatially separated from a heat-conductive filled outer chamber which is located directly behind the base plate of the mirror.