发明名称 |
Ceramic substrate having a multilayered metallic thin film |
摘要 |
A ceramic substrate has a five-layered thin metallic film thereon. The first layer is Ti, Zr, Cr and/or W; the second layer is Ni and/or Mo; the third layer is one or more metals of group Ib in the periodic table; the fourth layer contains the same metals as the second layer and the fifth layer contains the same metals as the third layer.
|
申请公布号 |
US5616423(A) |
申请公布日期 |
1997.04.01 |
申请号 |
US19940267892 |
申请日期 |
1994.07.06 |
申请人 |
SUMITOMO METAL INDUSTRIES, LTD. |
发明人 |
SANJYOU, AKIRA;NAKATSUKA, YASUO;MORITA, YASUYUKI;UNO, KOICHI |
分类号 |
C04B41/90;B32B15/01;H01L23/14;H01L23/15;H05K1/03;H05K1/09;(IPC1-7):B32B15/04 |
主分类号 |
C04B41/90 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|