发明名称 Ceramic substrate having a multilayered metallic thin film
摘要 A ceramic substrate has a five-layered thin metallic film thereon. The first layer is Ti, Zr, Cr and/or W; the second layer is Ni and/or Mo; the third layer is one or more metals of group Ib in the periodic table; the fourth layer contains the same metals as the second layer and the fifth layer contains the same metals as the third layer.
申请公布号 US5616423(A) 申请公布日期 1997.04.01
申请号 US19940267892 申请日期 1994.07.06
申请人 SUMITOMO METAL INDUSTRIES, LTD. 发明人 SANJYOU, AKIRA;NAKATSUKA, YASUO;MORITA, YASUYUKI;UNO, KOICHI
分类号 C04B41/90;B32B15/01;H01L23/14;H01L23/15;H05K1/03;H05K1/09;(IPC1-7):B32B15/04 主分类号 C04B41/90
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