| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform a polishing process under the supply of a polishing fluid from the inside of a polishing member, regarding a polishing device equipped with a rotary polishing member having a cylindrical outline form. SOLUTION: A polishing device has a polishing member 1 of hollow cylindrical form, a frame 2 for supporting the polishing member 1 in the direction parallel to worked surface 8, and a drive means 3 for rotating the polishing member 1. Furthermore, the polishing device is equipped with a sprinkler tube 4 to be inserted in the polishing member 1 in the axial direction thereof, and a polishing fluid feed means for feeding a polishing fluid to the sprinkler tube 4. The sprinkler tube 4 is formed to have sprinkling holes 41 for sprinkling the polishing fluid into the polishing member 1, while the polishing member 1 is formed to be liquid permeable.</p> |
