发明名称 Z MOVEMENT STAGE MECHANISM
摘要 <p>PROBLEM TO BE SOLVED: To obtain the reduction state of load weight stably and prevent its deformation by supporting a spring member by a second wedge mechanism whose wedge mechanism is formed same as the slant direction of the wedge and keeping the spring force of the spring member to constant, regardless of the height change of Z movement stage. SOLUTION: When a wedge drive body 20 is moved in an arrow mark B direction by a wedge movement mechanism 16 by the drive of an ultrasonic wave motor 23, Z movement stage 2 is moved in an arrow mark E direction by the operation of the wedge 15a... and when it is moved in an arrow mark D direction, Z movement stage 2 is moved in an arrow mark F direction and it is controlled so that a painting point for a test piece 30 may be always constant height. At this time, the lower end side support position of a compression coil spring for supporting Z movement stage 2 is adjusted by the operation of the wedge 36a... arranged on its lower surface and a push up force can be kept to constant without the change of the entire length (h) of the compression coil spring for supporting Z movement stage 2, even if the height position of Z movement stage 2 is changed to low or high position H1, H2.</p>
申请公布号 JPH0986888(A) 申请公布日期 1997.03.31
申请号 JP19950241592 申请日期 1995.09.20
申请人 TOSHIBA MACH CO LTD 发明人 NUMAGA TAKUOKI
分类号 B23Q1/00;B23Q1/25;B23Q1/44;B66F1/00;H01L21/68;(IPC1-7):B66F1/00 主分类号 B23Q1/00
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