| 摘要 |
<p>PROBLEM TO BE SOLVED: To raise operational dependency with a simple method at locking and unlocking processes, ensure the proper opening and closure of a carried container in an automatic operation mode and restrain the occurrence of particles, regarding a device to lock and unlock a container door. SOLUTION: Locking elements 7 to 10 arranged within a door 2 movable inside and outside are inserted in and coupled to the recesses 34 of a container 1 for the closure thereof at the time of outward travel along a curved route. Also, a wafer-like objects are loaded into or unloaded from a carrying container 1 on a plane parallel to the surface of the objects independently, and a cover is inserted in or removed from the lateral side of the container 1.</p> |
