| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element having high signal transmission efficiency, and an easy fabrication method thereof, in which fine patterning and high density with high power required for high frequency surface acoustic wave element can be realized without causing any migration or delamination of conductor film. SOLUTION: The surface acoustic wave element comprises a piezoelectric substrate 11, a circuit pattern groove made in the surface thereof, and conductors 12 buried in the groove. The fabrication process comprises a step for forming a circuit pattern mask on the substrate 11, a step for etching a circuit pattern groove, and a step for burying conductors in the groove. |
