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发明名称
ELECTRON BEAM DEVICE
摘要
申请公布号
JPH0982256(A)
申请公布日期
1997.03.28
申请号
JP19950233774
申请日期
1995.09.12
申请人
JEOL LTD
发明人
KOBAYASHI TOSHIJI
分类号
H01J37/09;H01J37/21;H01J37/28;(IPC1-7):H01J37/21
主分类号
H01J37/09
代理机构
代理人
主权项
地址
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