SEMICONDUCTOR PROCESSING APPARATUS AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To make it possible to prevent the decrease of the connecting strength of a ceramic base material by preventing the rise of the resistance value or disconnection of a wire of a resistance heater even when a ceramic heater is repeatedly used at a high temperature in a semiconductor manufacturing apparatus. SOLUTION: The semiconductor treating apparatus comprises a base material 6 made of dense ceramics and formed with a sealed space therein, a metal bulk material 4 installed in the space 7, and a terminal electrically connected to the material 4. The material 6 is made of the solid connector of the dense ceramics.