发明名称 THIN-FILM TRANSISTOR, MANUFACTURE THEREOF AND LIQUID-CRYSTAL DISPLAY
摘要 <p>PROBLEM TO BE SOLVED: To provide a thin-film transistor having excellent characteristics and high yield and manufacture thereof, and to provide a liquid-crystal display, which has superior and uniform characteristics even on a large-sized picture plane and in which a flicker and burning are reduced. SOLUTION: This transistor has a process, in which a light-shielding high resistance layer 103 is formed onto a transparent insulating substrate 101 and patterned, a process, in which a conductor layer is formed on the upper side of the light-shielding high resistance layer and patterned to a gate electrode 104, a process, in which a gate insulating layer 105 and a conductor layer 106 are shaped successively on the upper side of the gate electrode and these each layer is patterned, a process, in which a contact layer 107 and the conductor layer are formed in succession from the upper side of the semiconductor layer and a process, in which the contact layer and the conductor layer on the side upper than the semiconductor layer are removed and a source electrode 108 and a drain electrode 109 are formed.</p>
申请公布号 JPH0982976(A) 申请公布日期 1997.03.28
申请号 JP19950237474 申请日期 1995.09.14
申请人 TOSHIBA CORP 发明人 ONOZUKA YUTAKA;UEDA TOMOMASA
分类号 G02F1/136;G02F1/1368;H01L29/786;(IPC1-7):H01L29/786 主分类号 G02F1/136
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