发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device in which a high-voltage driving element and a low-voltage driving element can be formed on the same chip. SOLUTION: P-type buried layers 12 and N<+> -type buried layers 14 are formed at different levels in a semiconductor substrate 10 so that the layers 12 can become higher in level and epitaxial layers 13 and 15 are respectively formed on the buried layer 12 and 14. Then the surfaces of the epitaxial layers 13 and 15 are flattened and separating areas 32 are formed on the buried layers 12 near the boundaries between the buried layers 12 and 14. Finally, sink areas 42 are formed on the buried layers 14.</p>
申请公布号 JPH0982821(A) 申请公布日期 1997.03.28
申请号 JP19960110899 申请日期 1996.05.01
申请人 SAMSUNG ELECTRON CO LTD 发明人 KIN CHIYORUJIYUU
分类号 H01L27/06;H01L21/8249;H01L27/092;(IPC1-7):H01L21/824 主分类号 H01L27/06
代理机构 代理人
主权项
地址