| 摘要 |
PROBLEM TO BE SOLVED: To perform a matching process with high precision by canceling the deformation of an object image to be matched even if the object image is deformed. SOLUTION: The object image 2 to be matched is matched against matching reference images 1a-1d while shifted in position to obtain the position where the peak degree of matching is obtained and the peak degree of matching and obtain matching positions α, β, γ, and δ including the degrees Ma-Md of matching of the object image 2 against the matching reference images 1a-1d and the deviations, and the deviations of the matching positions are corrected to calculate a matching position P and a matching degree M, including no deviation, which corresponds to the matching position and matching degree obtained when a pattern in the same shape with the matching object image 2 is decided as a matching reference image. |
