| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability by increasing detection precision, to reduce a space occupation rate, and to easily correct a position shift. SOLUTION: When a member 1 to be inspected is irradiated with the light from a light source 2 and its reflected light is picked up by an image pickup device (CAMERA) to detect whether or not there is a flaw, for example, three CAMERAs (31-33) are provided as shown in the figure and then the detection precision is increased to improve the reliability. Here, the space occupation rate is reduced by interposing beam splitters 41-43. Further, a position shift correction quantity is obtained from the outputs of the CAMERAs 31-33 and then a read address of a memory is determined according to the quantity, thereby easily correcting the position shift not by a mechanical method. |
