QUANTITY OF ENERGY CONTROLLER AND EXPOSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a controller for controlling the quantity of energy highly accurately in a short time. SOLUTION: The controller for controlling the quantity of pulse energy by regulating the parameters (e.g. the voltage to be applied to an energy generation source) determining the quantity of pulse energy being oscillated from a pulse energy generation source 1 comprises means 7 for storing the relationship between the parameters and the quantity of pulse energy being oscillated from the pulse energy generation source 1 under that parameters while varying with time.