摘要 |
PROBLEM TO BE SOLVED: To minimize the force to be generated in an inside coil by exciting inner and outer superconducting coils from independent power supplies such that the fields are generated in the opposite directions from both coils and setting the position where the electromagnetic force acting on the inner superconducting coil as a correct position. SOLUTION: A holder 3 is secured to a cover member 10 such that an inner superconducting coil 1 is disposed on the inside of an outer superconducting coil 2 while being fitted idly. The outer superconducting coil 2 is then excited and an exciting current is fed to the inner superconducting coil 1 such that a field is generated reversely to that generated from the outer superconducting coil 2. When a horizontal moving member 4 moves horizontally and settled, it is secured thereat by means of an X stopper 13. Subsequently, the vertical settling position of a vertical moving member 5 is detected. Consequently, the inner superconducting coil 1 can be positioned without causing any positional shift in vertical or horizontal direction from the outer superconducting coil 2 and various accuracies required for each component can be set at low levels. |