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经营范围
发明名称
HEATER OF CRYSTAL GROWING SUBSTRATE
摘要
申请公布号
JPH0982642(A)
申请公布日期
1997.03.28
申请号
JP19950231727
申请日期
1995.09.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
IZUMI MOICHI
分类号
C30B23/06;C30B25/18;H01L21/203;H01L21/205;(IPC1-7):H01L21/203
主分类号
C30B23/06
代理机构
代理人
主权项
地址
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