SOLAR CELL AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To attempt to improve the photoelectric conversion efficiency of a solar cell by forming a crystalline silicon film of high quality having large crystal grain on a low-cost board such as a metal board or a glass board. SOLUTION: A first conductivity type amorphous silicon film is formed on a board 1, a nickel silicide is formed on the surface, and heat-treated to form a first conductivity type crystalline silicon film 4. The nickel silicide remaining on the film 4 is removed, and a second conductivity type crystalline silicon film 6 is formed on the surface.