| 摘要 |
PROBLEM TO BE SOLVED: To increase the internal stress of a garnet film without peeling the film or reducing the rate of crystallization and to suppress the segregation of Bi by laminating dielectric film on the garnet film formed on a substrate. SOLUTION: This magneto-optical recording medium has a garnet film 2 obtd. by removing the surface of a film crystallized after laminating on the flat plate-shaped substrate 1 of glass by etching, etc., and an SiO2 film 3 laminated on the film 2. The substrate 1 is formed out of a glass having 40×10<-7> / deg.C coefft. of thermal expansion and sputtering is carried out by a high-frequency sputtering method using a sintered target consisting of Bi, Dy, Ga, Fe and O. In the target, the ratio of Bi:Dy:Ga:Fe is 2.5:1.1:1.0:3.3. An amorphous film consisting of Bi, Dy, Ga, Fe and O is formed by the sputtering, Bi segregated in the surface of the film is etched and the film is crystallized by heat treatment by heating and cooling to obtain the magnetic garnet film 2.
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