COVER OPEN/CLOSE MECHANISM FOR WAFER CONVEYING CHAMBER

摘要

PROBLEM TO BE SOLVED: To realize a cover open/close mechanism for a wafer conveying chamber which makes it possible to open/close the cover with a small manpower, has excellent operability and safety and reduces the apparatus cost. SOLUTION: A mechanism for opening/closing a cover 1 of the upper surface of a wafer conveying chamber 2 while rotating the cover 1 at the fulcrum 8 of a shaft unit 7 fixed to the one end of the chamber 1 via a supporting jig 6 as a rotary shaft is provided, and further a gas spring 10 compressed when the cover 1 is opened is so mounted as to be extended is mounted between the jig 6 and the unit 7.