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发明名称
METHOD AND DEVICE FOR IRRADIATION WITH CHARGE PARTICLES
摘要
申请公布号
JPH0982618(A)
申请公布日期
1997.03.28
申请号
JP19950241228
申请日期
1995.09.20
申请人
HITACHI LTD
发明人
ANDO HIROZUMI;IIIZUMI KEN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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