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发明名称
ION IMPLANTING DEVICE
摘要
申请公布号
JPH0982268(A)
申请公布日期
1997.03.28
申请号
JP19950237972
申请日期
1995.09.18
申请人
SONY CORP
发明人
SUGIMURA SHINICHI
分类号
C23C14/48;H01J37/05;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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