| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to arbitrarily control the stretched amount of a wafer sheet by constituting vertically moving means by two synchronously driven first and second motors for vertically moving symmetrical parts at the center of the wafer sheet fixing ring of a wafer sheet stretching ring. SOLUTION: When first and second motors 22A, 22B are rotated, male threaded shafts 11A, 11B are rotated via gears 23A, 23B, 20A, 20B, and female threads 12A, 12B ring holder vertically moving members 13A, 13B, rollers 15, 16 and wafer sheet stretching ring holder 14 are moved down at a predetermined amount at each rotations of the motors 22A, 22B. In this case, the holder 14 is moved down 1mm by the holder 14 by one revolutions of the motors 22A, 22B. When they are rotated four revolutions at 4mm, the wafer sheet 2 is mounted on the annular part 5a of a wafer sheet fixing ring 5.</p> |
