CORRECTING LENS MEASURING EQUIPMENT FOR EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To measure the small surface angle of a correcting lens in a non- contact manner. SOLUTION: Laser beam is projected from a laser oscillator 15 to a correcting lens 7 and its transmitted light is received by a laser auto-collimator 16. The light receiving point of the laser auto-collimator 16 is picture-processed by a picture processor 30 to calculate a transmitted light refractive angleγ, so that the transmitted light refractive angleγcan be processed by a main control processor 34 to calculate the minute surface angleθof the correcting lens 7.