发明名称 SEMICONDUCTOR MATERIAL, METHOD OF PRODUCING THE SEMICONDUCTOR MATERIAL, AND SEMICONDUCTOR DEVICE
摘要 An amorphous insulator (4) is formed on a substrate (1; 1, 2, 3) and has windows where the substrate (1; 1, 2, 3) is exposed. On the exposed parts (40) of the substrate and the insulator (4), a compound semiconductor (5, 51, 52) containing at least nitrogen as a constituent is formed to form a semiconductor material (1, 5, 51, 52). A semiconductor device is fabricated by processing the semiconductor material (1, 5, 51, and 52) or a semiconductor material (6 and 7) formed on the semiconductor material (1, 5, 51, and 52).
申请公布号 WO9711518(A1) 申请公布日期 1997.03.27
申请号 WO1996JP02663 申请日期 1996.09.17
申请人 HITACHI, LTD.;TANAKA, TOSHIAKI;AOKI, SHIGERU 发明人 TANAKA, TOSHIAKI;AOKI, SHIGERU
分类号 H01L21/20;H01L33/00;H01L33/02;H01L33/06;H01L33/08;H01L33/10;H01L33/12;H01L33/14;H01L33/16;H01L33/20;H01L33/32;H01L33/34;H01L33/36;H01L33/46;H01S5/02;H01S5/183;H01S5/20;H01S5/223;H01S5/227;H01S5/323;H01S5/42;(IPC1-7):H01S3/18;C30B23/02;H01L21/205 主分类号 H01L21/20
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