申请人 |
EBARA CORP., TOKIO/TOKYO, JP |
发明人 |
MORIYA, MASAYOSHI, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;KOBAYASHI, MAKOTO, C/O EBARA RESEARCH CO., LTD, FUJISAWA-SHI, KANAGAWA-KEN, JP;YAMAMOTO, MASAKAZU, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;MIYAKE, YOSHIO, C/O EBARA RESEARCH CO., LTD, FUJISAWA-SHI, KANAGAWA-KEN, JP;SAKACHO, HIROMI, C/O EBARA RESEARCH CO., LTD, FUJISAWA-SHI, KANAGAWA-KEN, JP;ISEMOTO, KOJI, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;KATSUTA, SEIGO, C/O EBARA CORPORATION, TOKYO, JP;FUJII, KUNIHIKO, C/O EBARA CORPORATION, TOKYO, JP;MORI, KIKUICHI, C/O EBARA CORPORATION, TOKYO, JP |