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发明名称
Anordnung zur Polymer-Beschichtung mittels einen durch Mikrowellen angeregten Plasma
摘要
申请公布号
DE69308077(D1)
申请公布日期
1997.03.27
申请号
DE19936008077
申请日期
1993.07.08
申请人
VALEO VISION, BOBIGNY, FR
发明人
MONTALAN, DOMINIQUE, F-75019 PARIS, FR;PHAN, PASCAL, F-95000 CERGY, FR;RENOULT, JEAN-PIERRE, F-75020 PARIS, FR;ROLLAND, PASCAL, F-78150 ROQUENCOURT, FR
分类号
H01J37/32;H05H1/46;(IPC1-7):H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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