Pyroelectric infrared detector and method of fabricating the same

摘要

A pyroelectric infrared detector includes a substrate having a recess. A pyroelectric portion substantially aligns with the recess. A resin film is located between the substrate and the pyroelectric portion. The recess faces the resin film. First and second electrodes are connected to first and second surfaces of the pyroelectric portion respectively. The pyroelectric portion may include a pyroelectric film of PbxLayTizZrwO3 where atomic fractions "w", "x", "y", and "z" satisfy one of following conditions a), b), and c): a) 0.7