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发明名称
摘要
申请公布号
JP2594128(B2)
申请公布日期
1997.03.26
申请号
JP19880198402
申请日期
1988.08.09
申请人
发明人
分类号
H01L27/146;(IPC1-7):H01L27/146
主分类号
H01L27/146
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