MAGNETIC STRUCTURE FOR ELECTRON-BEAM HEATED EVAPORATION SOURCE,申请号EP19900908872-传众专利搜索

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发明名称	MAGNETIC STRUCTURE FOR ELECTRON-BEAM HEATED EVAPORATION SOURCE
摘要
申请公布号	EP0428682(B1)	申请公布日期	1997.03.26
申请号	EP19900908872	申请日期	1990.05.17
申请人	HANKS, CHARLES W.	发明人	HANKS, CHARLES W.
分类号	C23C14/30;H01J37/14;H01J37/147;H01J37/305;H01J37/317;(IPC1-7):H01J37/305	主分类号	C23C14/30
代理机构		代理人
主权项
地址

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