发明名称 Trench isolation
摘要 An island of material has an insulating trench structure. The trench structure includes a first insulating trench surrounded by a second insulating trench. The trenches are joined together by at least two transverse linking trenches.
申请公布号 SE9701126(D0) 申请公布日期 1997.03.26
申请号 SE19970001126 申请日期 1997.03.26
申请人 TELEFONAKTIEBOLAGET L M ERICSSON 发明人 ANDERS KARL SIVERT *SOEDERBAERG;NILS OLA *OEGREN;ERNST HAAKAN *SJOEDIN;OLOF MIKAEL *ZACKRISSON
分类号 H01L21/76;H01L21/763;(IPC1-7):H01L/ 主分类号 H01L21/76
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