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发明名称
METHOD AND DEVICE FOR CLEANING SINGLE-CRYSTAL BLOCK
摘要
申请公布号
JPH0975874(A)
申请公布日期
1997.03.25
申请号
JP19950266391
申请日期
1995.09.19
申请人
MITSUBISHI MATERIALS SHILICON CORP;MITSUBISHI MATERIALS CORP
发明人
SUGITANI KAZUAKI;KIYAMA TAKUMI;KITAMURA YOSHIKI;TAKAISHI KAZUNARI
分类号
B08B3/12;B23Q11/00;B28D5/00;H01L21/304;(IPC1-7):B08B3/12
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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