| 摘要 |
PROBLEM TO BE SOLVED: To improve the glass sealability, copper metallizability and deflective strength of an AlN sintered compact as well as to attain high density and more satisfactory heat conductivity than that of alumina by sintering at a low temp. SOLUTION: This AlN sintered compact consists essentially of AlN as a principal constituent and B, Si, O, Al, groups IIIa and IIa elements of the Periodic Table as subsidiary constituents, contains the subsidiary constituents by 20-65wt.% and has 40-80W/mK heat conductivity. It is produced by adding 20-65wt.%, in total, of the elements in the form of simple substances or compds. to AlN powder while satisfying IIIa:IIa:O:B:Si=(16-31):(4-10):(9-17):(0.4-1.6):(0.3-1.2) and firing the prepd. stock of a sintered compact at 1,673-1,873K. |
