| 摘要 |
Compressed air is introduced into a cylinder chamber to displace a piston closely to a target position. Then, a ball screw shaft is rotated about its own axis by an electric motor to inch the piston to the target position. Upon arrival of the piston at the target position, the ball screw shaft is stopped by a brake mechanism to hold the piston accurately in the target position. The drive shaft of the electric motor extends parallel to the ball screw shaft, thus reducing the entire length of a servo cylinder apparatus. Solenoid-operated directional control valves, for supplying compressed air to the cylinder chamber and the brake mechanism are coupled integrally to a cylinder assembly, so that pipes are shortened for allowing the piston to be displaced and stopped quickly and accurately.
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