发明名称 |
Method of fabricating barium strontium titanate |
摘要 |
A precursor liquid comprising barium and strontium 2-ethylhexanoates and titanium 2-methoxyethanol in a 2-methoxyethanol solvent is prepared, a substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of barium strontium titanate on the substrate. Then an integrated circuit is completed to include at least a portion of the layered superlattice material film in a component of the integrated circuit.
|
申请公布号 |
US5614252(A) |
申请公布日期 |
1997.03.25 |
申请号 |
US19950478398 |
申请日期 |
1995.06.07 |
申请人 |
SYMETRIX CORPORATION |
发明人 |
MCMILLAN, LARRY D.;PAZ DE ARAUJO, CARLOS A. |
分类号 |
B05D1/00;B05D3/04;B05D7/24;C23C16/40;C23C16/44;C23C16/448;C23C16/455;C23C16/46;C23C16/48;C23C16/52;C23C18/12;C23C18/14;C23C26/02;C30B7/00;H01L21/02;H01L21/314;H01L21/316;H01L27/115;H01L41/24;H05K3/10;(IPC1-7):B05D5/12 |
主分类号 |
B05D1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|