发明名称 Using a Lewis base to control molecular weight of novolak resins
摘要 The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a precise and consistent molecular weight, by adjusting the concentration of Lewis base. A method is also provided for producing photoresist composition from such novolak resins and for producing semiconductor devices using such photoresist compositions.
申请公布号 US5614349(A) 申请公布日期 1997.03.25
申请号 US19920997942 申请日期 1992.12.29
申请人 HOECHST CELANESE CORPORATION 发明人 RAHMAN, M. DALIL;AUBIN, DANIEL P.;DURHAM, DANA L.;DAMMEL, RALPH R.
分类号 C08G8/00;C08G8/08;C08G8/10;G03F7/023;(IPC1-7):G03F7/023;C08G8/04 主分类号 C08G8/00
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