High-speed peristaltic CCD imager with GaAs fet output

摘要

An improved CCD imaging array is disclosed which is capable of operating at 10,000 frames-per-second. The imager consists of an array of 512x512 pixels having 16 serial output channels which provides a composite output data rate up to 250 Megasamples/second. The serial output registers are constructed from peristaltic CCDs, each having a GaAs FET output circuit bump-mounted to the silicon substrate. A four-layer pinned photodiode is utilized as the photodetector, and each photodiode has its own antiblooming drain. The antiblooming gates double as an optical shuttering device. Sample-and-hold output circuitry is also provided.