MANUFACTURE FOR LASER DIODE

摘要

(a) The first conduction type clad layer(2) and the second conduction type active layer(3) is formed on the first conduction type subsrate(1). (b) After the second conduction type clad layer(4) is formed on the active layer, the upper part of inclined plane is etched to contain (110)plane and the inclined plane is etched to contain (111)plane. (c) After the clad layer is etched, the current limit layer(5) of even plane is formed by growing the current limit layer of the first conduction type. (d) The second conduction type cap layer(6) is formed on the current limit layer.