METHOD OF EVACUATION OF GASES AND VACUUM FOR EVACUATION OF GASES

摘要

FIELD: vacuum engineering; methods and devices for evacuation of gases. SUBSTANCE: travelling wave is excited in wall of rotor (diaphragm) by means of piezoelectronic wave generator and parameters of process, mainly frequency and amplitude of wave are set in accordance with given relationships. Device for realization of this method contains metal diaphragm no more than 0.3 mm thick and at specified length of evacuation passage in accordance with given relationship. Two versions of construction are proposed: with circular flat diaphragm and tubular diaphragm. Device makes it possible to obtain pressure in high-vacuum chamber of 10Pa at rate of evacuation equal to 1 l/s. EFFECT: increased rate of evacuation and compression due to enhance efficiency of conversion of travelling wave energy into translational motion of gas. 6 cl, 2 dwg