| 摘要 |
<p>A grinding method which uses grindstone comprising abrasive grains and a binding resin for binding the abrasive grains, and a grinding device for use in the same. Grindstone having a desired elastic modulus can be manufactured by means of a resin for binding abrasive grains. Accordingly, surfaces of a substrate having irregularity can be evenly flattened irrespective of dimensions of irregularity. Further, an abraded surface with less damage can be obtained by performing abrasion with an abrasive tool of a large elastic modulus after abrasion is preformed with an abrasive tool of a small elastic modulus. The present method is effective in flattening the surfaces of various substrates having irregularity.</p> |
