Semiconductor sensor device for pressure or acceleration detection

摘要

The semiconductor sensor has a semiconductor chip (2) with a signal converter section (3), for producing a pair of signal voltages (V1, V2). The difference between these corresponds to a physical variable. A pair of signal amplifying sections are provided for the individual amplifying of the two signal voltages, and a subtracting section is provided for producing a differential voltage between the amplified signal voltages. The two amplifying sections are provided at symmetrical positions on the semiconductor chip. The semiconductor sensor in addition has a carrying part (1), which is connected with the semiconductor chip. The reference line (L) connects a centre point of the semiconductor chip and a centre point of one side of the semiconductor chip.