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发明名称
Messanordnung zur berührungslosen Bestimmung der Dicke und/oder thermischen Eigenschaften von Folien und dünnen Oberflächenschichten
摘要
申请公布号
DE59305383(D1)
申请公布日期
1997.03.20
申请号
DE19935005383
申请日期
1993.08.09
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
BAUMANN, JOACHIM, DR., D-81925 MUENCHEN, DE;BEYFUSS, MARTIN, DIPL.-PHYS., D-81379 MUENCHEN, DE
分类号
G01N25/72;(IPC1-7):G01N25/72
主分类号
G01N25/72
代理机构
代理人
主权项
地址
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