| 摘要 |
PROBLEM TO BE SOLVED: To enhance the measuring accuracy of an X-ray diffraction measuring device without scaling up the apparatus. SOLUTION: An X-ray diffraction measuring device is equipped with a position sensitive proportional counter 12 having a fixed and supported circular arc X-ray detection part, the first rotary member 13 rotatable around a first axial line χ, the second rotary member 17 supported so as to be rotatable around the second axial line ω crossing the first axial line χ and the third rotary member 23 passing the intersecting point of the first and second axial lines χ, ω by the second rotary member 17 and supported so as to be rotatable around the third axial line ϕwithin the plane vertical to the second axial line ω. Further, the Z-table 19 movable in the Z-axis direction parallel to the third axial line ϕ and provided between the second and third rotary members 17, 23 and the X-table and Y-table 29 respectively movable in the directions of X- and Y-axes constituting three axes crossing the Z-axis at a right angle and supported by the third rotary member 23 are provided. |
