| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer carrying case and wafer carrying method whereby a wafer can be carried safely. SOLUTION: A wafer carrying case having: a lower case half body 1B with a wafer picking up hole 9 in the center thereof; an upper case half body 1A connected openably with the lower case half body 1B via a coupling pivot 4 and having a visual-inspection window 5 in the center thereof; an elastic material 10 laid in the lower case half body 1B and having an opening 11 corresponding to the wafer picking up hole 9; an elastic material 6 laid in the upper case half body 1A and having a through hole 7 corresponding to the visual- inspection window 5, wherein a wafer 50 is interposed fixedly between the elastic materials 6, 10 in the storage space formed out of the upper and lower case half bodies 1A, 1B.</p> |
