摘要 |
Substrate bias control circuitry 100 is provided which includes a bias sensor 101 for measuring a bias voltage of a substrate and generating a control signal and response. A master oscillator 102 is provided for generating a first driving signal, a frequency of the first driving signal adjusted by the control signal generated by the bias sensor 101. A first charge pump 103 is provided for pumping electrons into a substrate in response to the first driving signal. A slave oscillator generates a second driving signal, a frequency of the second driving signal is determined from the frequency of the first driving signal using a phase-locked loop. A second charge pump 105 is provided for pumping electrons into the substrate in response to the second driving signal.
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