| 摘要 |
PROBLEM TO BE SOLVED: To effectively inspect the defect of the surface of a board. SOLUTION: Parallel beams are generated from a parallel beam generator 8, based on the light from an illumination unit 7, and incident perpendicularly to the surface of a board 4 via a half mirror 9. The reflected light from the board 4 is imaged by a CCD camera 6. The number px of the defect detection pixels of the abnormal part of the imaged picture is counted, converted to a defect volume (v), and the size of the defect is decided. The surface of the board 4 is imaged by the camera 6 while generally diffusion illuminating the surface of the board 4, and the defect area A is obtained from the imaged picture. The defect height or depth d=v/(k×A) is calculated, and the defect is judged from this as well. |
